Inspection method and apparatus, lithographic apparatus,...

Details Inspection method and apparatus, lithographic apparatus,... Inspection method and apparatus, lithographic apparatus,...

2006-11-22

2009-12-08

Toatley, Jr., Gregory J (Department: 2877)

Optics: measuring and testing

Shape or surface configuration

C356S237100, C356S237600, C356S609000

Reexamination Certificate

active

07630087

ABSTRACT:
Measurement of a profile of a scatterometry object on top of one or more product layers on a substrate is disclosed. To prevent an unknown parameters of one or more product layers having an effect on the measurement of the object profile, the thickness of the one or more product layers is measured prior to measuring the profile of the scatterometry object on the layer(s). In an embodiment, each of a plurality of product layers is measured as it is exposed so that only the degree of freedom of the most recently exposed product layer is unknown at each measurement step. When each of a plurality of product layers has been measured, and a scatterometry object is placed at the top of the layers, only the degrees of freedom of that scatterometry object should be unknown and only the profile of the object should need to be measured.

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