Optics: measuring and testing – Lens or reflective image former testing
Reexamination Certificate
2011-03-29
2011-03-29
Chowdhury, Tarifur (Department: 2886)
Optics: measuring and testing
Lens or reflective image former testing
C356S125000, C356S601000, C356S625000, C356S636000, C430S022000, C430S030000
Reexamination Certificate
active
07916284
ABSTRACT:
In a scatterometric method differential targets with different sensitivities to parameters of interest are printed in a calibration matrix and difference spectra obtained. principal component analysis is applied to the difference spectra to obtain a calibration function that is less sensitive to variations in the underlying structure than a calibration function obtained from spectra obtained from a single target.
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Cramer Hugo Augustinus Joseph
Den Boef Arie Jeffrey
Dusa Mircea
ASML Netherlands B.V.
Chowdhury Tarifur
Sterne Kessler Goldstein & Fox P.L.L.C.
Stock, Jr. Gordon J
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