Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate
2011-03-29
2011-03-29
Mariam, Daniel G (Department: 2624)
Image analysis
Applications
Manufacturing or product inspection
C382S209000
Reexamination Certificate
active
07916927
ABSTRACT:
Building of a model profile for a target is disclosed. An embodiment of the method includes importing an image of a known object and superimposing, on this image, either by hand or automatically, an estimated profile. The estimated profile is defined mathematically and adjusted segment by segment in order to match the image such that the adjusted estimated profile may be stored alongside a diffraction spectrum associated with the image. Alternatively or additionally, a user may trace (or free-draw) the profile of a known image and subsequently map a shape-definer of a mathematical function such as a polynomial equation, a spline or a vector onto the estimated profile in order to obtain a profile and one or more variables of that profile that may be used to reconstruct the profile of an unknown object from its diffraction pattern.
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Cramer Hugo Augustinus Joseph
Kiers Antoine Gaston Marie
Naumoski Goce
Van Der Ploeg Durk Oeds
Van Weel Roland Mark
ASML Netherlands B.V.
Mariam Daniel G
Sterne, Kessler, Goldstein & Fox P.L.L.C
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