Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate
2006-04-26
2010-02-23
Desire, Gregory M (Department: 2624)
Image analysis
Applications
Manufacturing or product inspection
C382S209000
Reexamination Certificate
active
07668364
ABSTRACT:
Inspection of partially drilled microvias by fluorescence based optical imaging techniques, selective coaxial illumination and multivariable off-axis illumination and the use of comparative image analysis and the transformation of back reflected radiation by means of an integrated fluorescing plate mounted to the surface of a CCD or EMCCD array.
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Lizotte Todd E.
Ohar Orest
Davis & Bujold P.L.L.C.
Desire Gregory M
Hitachi Via Mechanics Ltd.
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