Inspection method and apparatus for circuit pattern

Details Inspection method and apparatus for circuit pattern Inspection method and apparatus for circuit pattern

2007-05-15

2007-05-15

Patel, Paresh (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C250S310000

Reexamination Certificate

active

11218762

ABSTRACT:
An apparatus for measuring a sample with a circuit pattern including at least a porous low-permittivity hydrogensilsesquioxane material or a material structurally or compositionally similar to the porous low-permittivity hydrogensilsesquioxane. The apparatus includes an electron beam optics unit which enables scanning of a primary electron beam onto the sample, a detector which detects a secondary electron or a reflected electron, an image processing unit which measures a desired portion of the sample irradiated with the primary electron beam based on an output signal of the detector, and a control unit which controls the irradiation energy and density of the primary electron beam onto the sample.

REFERENCES:
patent: 5798529 (1998-08-01), Wagner
patent: 5986263 (1999-11-01), Hiroi
patent: 6184526 (2001-02-01), Kohama et al.
patent: 6519758 (2003-02-01), Miyagawa
patent: 6563114 (2003-05-01), Nagahama et al.
patent: 2002/0155378 (2002-10-01), Uetani
patent: 2004/0051040 (2004-03-01), Nasu et al.
patent: 53-030865 (1978-03-01), None
patent: 11-160402 (1999-06-01), None
patent: 2002-200579 (2000-07-01), None
patent: 2002-014062 (2002-01-01), None

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