Classifying – separating – and assorting solids – Sorting special items – and certain methods and apparatus for... – Traveling item turned to predetermined position
Reexamination Certificate
1999-09-27
2001-09-25
Nguyen, Tuan N. (Department: 3653)
Classifying, separating, and assorting solids
Sorting special items, and certain methods and apparatus for...
Traveling item turned to predetermined position
C209S541000, C209S556000, C414S788600, C414S788700
Reexamination Certificate
active
06293408
ABSTRACT:
FIELD OF THE INVENTION
This invention relates to an apparatus and method for inspecting and handling devices that are semi-constrained in compartmented trays. More particularly, the invention relates to an apparatus and method for conveying devices contained in trays to and through multiple inspection and handling stations.
BACKGROUND OF THE INVENTION
Semiconductor devices such as integrated circuit chips need to be precisely fabricated since exact precision is required to insure that such devices have an exact predetermined geometry. Although such fabrication produces high quality results, defective devices are fabricated that have geometry variations in coplanarity, span and sweep as well as mark defects in content, legibility, contrast, orientation and quality, which are outside tolerances for acceptable devices. Accordingly, inspection of the devices is necessary to ascertain whether the devices meet exacting acceptance standards. The inspection stages generally include both camera and laser inspections.
The semiconductor devices to be inspected are typically provided in compartmented trays which have multiple rows and columns of pockets into which the devices are placed. Trays typically hold between 50 and 100 devices, and the trays are often configured to be stackable.
Machines of the type to which this invention relates have been used in the past. In that regard it has been proposed to cycle a tray loaded with semiconductors from an input module through intervening inspection modules and a pick-and-place module to an outfeed module, and to achieve an inversion of the semiconductors between the inspection modules. A desire in connection with such machines is ongoing to increase the speed and reliability of processing the semiconductors and to do so without complicating the structure or system.
Accordingly, among the objects of this invention are to improve the speed and reliability of the inspection and/or otherwise processing of such semiconductors and to do so without complicating either the machine's structure or the process.
SUMMARY OF THE INVENTION
For the achievement of these and other objects, this invention proposes to transport trays loaded with semiconductor devices through the infeed, inspection, pick-and-place (PNP) and outfeed modules, and an inverter module, along a linear path. That is, the transport moves the loaded tray in a straight line to and through the modules with the various operations being performed on the tray and the semiconductor devices carried in the tray, with the tray positioned on or in registry with that linear path. Consistent with that format, the inversion of the tray between inspection modules is accomplished by displacing the devices while in a tray vertically from the linear path, rotating the devices 180 degrees while they are still held captive in the tray, and returning the devices to the liner path, again in a tray. In executing the inversion, the inverter module is loaded with a pre-positioned empty, transfer tray which cooperates with an incoming loaded carrier tray to achieve the inversion. In the course of carrying out the inversion step, the pre-positioned tray becomes a carrier tray and exits the inverter module as a carrier tray loaded with the semiconductor devices. What had been the carrier tray remains in the inverter module and awaits arrival of a subsequent, incoming carrier tray. The tray left in the inverter module is itself rotated 180 degrees to be in the proper orientation for cooperation with the next incoming carrier tray and becomes a pre-positioned tray.
Other features and advantages of the invention will become apparent to those of ordinary skill in the art upon review of the following detailed description and drawings.
REFERENCES:
patent: 4746154 (1988-05-01), James et al.
patent: 5049030 (1991-09-01), Lockert
patent: 5168218 (1992-12-01), Rich
patent: 5207331 (1993-05-01), Telgarden et al.
patent: 5441380 (1995-08-01), Horikawa
patent: 4-234143A (1992-08-01), None
Behnke Merlin E.
Bertz Robert G.
Bilodeau Steven J.
Fusco, Jr. William
Jacovino Frank L.
Michael & Best & Friedrich LLP
Nguyen Tuan N.
Robotic Vision Systems, Inc. (RVSI)
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