Inspection equipment of circuit board and inspection method...

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

Reexamination Certificate

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Reexamination Certificate

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07489147

ABSTRACT:
An apparatus and method for inspecting a circuit board is described which can well absorb a variation in a height of an electrode to be inspected and can maintain an insulating property between adjacent inspection electrodes even if the electrode to be inspected is arranged at a fine pitch.

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patent: 7038471 (2006-05-01), Kimura et al.
patent: 2006/0043991 (2006-03-01), Shimoda et al.
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U.S. Appl. No. 11/632,287, filed Jan. 12, 2007, Kimura et al.
U.S. Appl. No. 12/089,608, filed Apr. 9, 2008, Yamada et al.
U.S. App. No. 11/994,865, filed Jan. 7, 2008, Kimura et al.

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