Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2007-12-18
2007-12-18
Stafira, Michael P. (Department: 2886)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
C356S237200
Reexamination Certificate
active
10497053
ABSTRACT:
Disclosed is a pattern inspection apparatus which easily and highly accurately detects a profile error (deviation) of at least one pattern having a cross section with projections and recesses. The inspection apparatus for the pattern32is for detecting the profile error of the pattern having a cross section with a projection and a recess. This inspection apparatus includes a plate30on which a pattern is mounted, light sources40, 42and44which can change angles of illuminating light emitted onto the pattern, within a range of 15 to 75 degrees with reference to the top surface of the pattern, and photodetectors52and54which can receive reflected light from the pattern at an angle within a range of 15 to 75 degrees with reference to the top surface of the pattern. The inspection apparatus is characterized by that the profile error of the pattern is detected based on an amount of the reflected light from an edge between the top surface and the side surface of each of the patterns.
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Hayano Teruhiko
Oishi Chiaki
Suzuki Akira
Terakawa Kazunari
Uda Mitsuru
Scully , Scott, Murphy & Presser, P.C.
Stafira Michael P.
Trepp, Esq. Robert M.
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