Inspection apparatus to break the oxide of an electrode by...

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

Reexamination Certificate

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C324S756010

Reexamination Certificate

active

11759816

ABSTRACT:
Disclosed is an inspection method for inspecting the electrical characteristics of a device by bringing an inspecting probe into electrical contact with an inspection electrode. An insulating film formed on the surface of the inspection electrode is broken by utilizing a fritting phenomenon so as to bring the inspection electrode into electrical contact with the inspection electrode.

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Mark Beiley, et al. “A Micromachined Array Probe Card-Characterization” IEEE Transactions on Components, Packaging, and Manufacturing Technology-Part B, vol. 18, No. 1, Feb. 1995 pp. 184-191.

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