Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2006-12-01
2011-11-22
Kim, Peter B (Department: 2882)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S030000
Reexamination Certificate
active
08064038
ABSTRACT:
The invention relates to an inspection apparatus and a method for inspecting a sample, such as a lithographic patterning device or mask, for anomalies, such as contamination particles or defects. The inspection apparatus includes a support structure constructed and arranged to support the sample, and a radiation system constructed and arranged to radiate a sample with a radiation beam. The radiation system is provided with a first polarizer. The apparatus also includes a detection system constructed and arranged to detect radiation that is reflected from the sample with a detector. The detection system is provided with a second polarizer.
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Brouwer Egbert Anne Martijn
Van Brug Hedser
ASML Netherlands B.V.
Kim Peter B
Sterne Kessler Goldstein & Fox P.L.L.C.
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