Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Reexamination Certificate
2010-01-25
2011-10-18
Tang, Minh N (Department: 2858)
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
C324S750010, C250S492200
Reexamination Certificate
active
08040146
ABSTRACT:
There are provided an inspection apparatus and method that can locally perform sample temperature regulation, so that the sample drift can be suppressed. There are included a sample stage109that holds a semiconductor sample118, multiple probes106used to measure electrical characteristics of a semiconductor device on the semiconductor sample118, a power source that applies voltage and/or current to the probe106, a detector that measures electrical characteristics of the semiconductor device on the sample with which the probe is brought into contact, and an electromagnetic wave irradiating mechanism that irradiates electromagnetic wave on a measurement section of the semiconductor sample118.
REFERENCES:
patent: 5439777 (1995-08-01), Kawada et al.
patent: 5631571 (1997-05-01), Spaziani et al.
patent: 6734687 (2004-05-01), Ishitani et al.
patent: 6747464 (2004-06-01), Blackwood
patent: 6971791 (2005-12-01), Borden et al.
patent: 7071713 (2006-07-01), Furukawa et al.
patent: 7129727 (2006-10-01), Saito et al.
patent: 7372283 (2008-05-01), Furukawa et al.
patent: 7663390 (2010-02-01), Sunaoshi et al.
patent: 2003/0146761 (2003-08-01), Pakdaman et al.
patent: 09-326425 (1997-12-01), None
patent: 2005-210067 (2005-08-01), None
patent: 2006-125909 (2006-05-01), None
Mizuno et al “Development of High Temperature Sample Stage for Nano-Prober” LSI Testing Symposium-2006 pp. 301-304 The Institute of LSI Testing, (2006).
Komori Masaaki
Kurosawa Kouichi
Sato Takeshi
Sunaoshi Takeshi
Hitachi High-Technologies Corporation
McDermott Will & Emery LLP
Tang Minh N
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