Inspection apparatus for inspecting resist removal width

Details Inspection apparatus for inspecting resist removal width Inspection apparatus for inspecting resist removal width

2006-03-07

2006-03-07

Luu, Thanh X. (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

With circuit for evaluating a web, strand, strip, or sheet

C356S237200

Reexamination Certificate

active

07009196

ABSTRACT:
An inspection apparatus for inspecting a resist boundary on a substrate having an outer surrounding portion, includes: an illumination unit which illuminates the outer surrounding portion of the substrate; a detector which detects light reflected from the outer surrounding portion; and a judgment unit which judges, based on light intensity of the detected reflected light, whether a resist removal width is proper.

REFERENCES:
patent: 6222624 (2001-04-01), Yonezawa
patent: 2003/0030050 (2003-02-01), Choi
patent: 0977029 (2000-02-01), None
patent: WO 02/23123 (2002-03-01), None

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