Inspection apparatus for detecting foreign matter on a surface t

Details Inspection apparatus for detecting foreign matter on a surface t Inspection apparatus for detecting foreign matter on a surface t

1994-06-27

1995-10-24

Rosenberger, Richard A.

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

G01N 2188

Patent

active

054614740

ABSTRACT:
When inspecting the presence of foreign matter on a surface to be inspected by scanning the surface with a light beam from a light source utilizing a scanning system, and receiving scattered light from the surface by a detector, a correlation is utilized between a signal representing first scattered light obtained from the detector when the light beam scans a first line on the surface, and a signal representing second scattered light obtained from the detector when the light beam scans a second line displaced from the first line by a predetermined amount in a direction orthogonal to the direction of the first line.

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