Inspection apparatus for automatically detecting the unevenness

Details Inspection apparatus for automatically detecting the unevenness Inspection apparatus for automatically detecting the unevenness

1976-03-17

1978-08-29

Corbin, John K.

Optics: measuring and testing

Inspection of flaws or impurities

Bore inspection

250572, 356237, G01N 2132

Patent

active

041100476

ABSTRACT:
A scanning inspection apparatus comprising two light beams each having a different angle of incidence to the surface of the object and light detecting means for receiving lights reflected by the surface of the object. Said two light beams are provided by a light beam generating means, a rotating mirror and a semitransparent mirror.
A plane including a light path of the light beam radiated by the light beam generating means and a light path of the light beam reflected by the rotating mirror is arranged to be perpendicular to the reflecting face of the rotating mirror.

REFERENCES:
patent: B469036 (1976-03-01), Neale et al.
patent: 3573849 (1971-04-01), Herriot
patent: 3825351 (1974-07-01), Seki et al.
patent: 3841761 (1974-10-01), Selgin
patent: 3944369 (1976-03-01), Cuthbert

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