Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Patent
1976-11-18
1978-07-04
Demeo, Palmer C.
Radiant energy
Photocells; circuits and apparatus
Optical or pre-photocell system
250223R, 356210, 356237, G01N 2132, G01N 2148
Patent
active
040990516
ABSTRACT:
The disclosure is directed to an apparatus for inspecting the surface of an object at an inspection position. In accordance with an embodiment of the invention, source means are provided for generating a relatively narrow collimated beam of radiation, the source preferably, but not necessarily, being a laser. A scanning means, spaced from the inspection position, is provided for effecting a substantially circularly shaped scan of the laser beam at the inspection position. The scanning means may typically comprise a tilted rotatable mirror which is rotated at the scan rate. A reflector means is disposed between the scanning means and the inspection position. The reflector means, typcially a mirror, has an aperture therein to allow passage of the scanning beam travelling toward the inspection position. The mirror reflective surface is oriented angularly with respect to the axis of the scan so that radiation received from the object is reflected toward an off-axis region. Photodetector means are located at the off-axis region, and a lens means, disposed between the reflector means and the photodetector, serves to focus radiation from the reflector means onto the photodetector. In a preferred embodiment of the invention, a second reflective surface is mounted on the rear of the reflector means. The source means is adapted to direct the beam toward the second reflective surface which is oriented to reflect the beam toward the tilted rotatable mirror. In one form of this embodiment, the second reflective surface is a corner mirror mounted adjacent the aperture. In another form of this embodiment, the second reflective surface is mounted centrally within the aperture. In another embodiment of the invention, a second lens means is disposed between the inspection position and the reflector means to focus energy from the object onto the reflector means.
REFERENCES:
patent: 3072798 (1963-01-01), Sick
patent: 3150266 (1964-09-01), Mathias
patent: 3790287 (1974-02-01), Cuthbert et al.
patent: 3899687 (1975-08-01), Jones
patent: 3976384 (1976-08-01), Matthews et al.
Automation Systems Inc.
DeMeo Palmer C.
Novack Martin
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