Inspection apparatus and method for inspecting electric...

Details Inspection apparatus and method for inspecting electric... Inspection apparatus and method for inspecting electric...

2008-06-25

2011-12-20

Velez, Roberto (Department: 2858)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S754110

Reexamination Certificate

active

08081007

ABSTRACT:
An inspection apparatus for inspecting electric characteristics of a plurality of devices formed on a target object includes a vertical drive mechanism for lifting and lowering a movable mounting table and a control unit for controlling the vertical drive mechanism. The vertical drive mechanism includes an elevation shaft connected to the mounting table and a servo motor for driving the elevation shaft to lift and lower the mounting table. Further, the control unit has a servo driver which includes a position control part for controlling a position of the servo motor, a torque control part for controlling a torque of the servo motor as a probe card is expanded or contracted by a change in temperature and a switching part for switching the position control part and the torque control part.

REFERENCES:
patent: 2003/0025495 (2003-02-01), Ilno et al.
Office Action issued Sep. 21, 2010, in Chinese Patent Application No. 200810109792.0 with English translation.

Affiliated with

Also associated with

Rating

Inspection apparatus and method for inspecting electric... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Inspection apparatus and method for inspecting electric..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Inspection apparatus and method for inspecting electric... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4313583