Inspection apparatus and method, and production method for...

Details Inspection apparatus and method, and production method for... Inspection apparatus and method, and production method for...

2011-03-15

2011-03-15

Chowdhury, Tarifur R. (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237100, C356S237500

Reexamination Certificate

active

07907270

ABSTRACT:
According to a first aspect of the present invention, there is provided an inspection apparatus including an objective lens, a reflected illumination optical system that illuminates a first area which is part of a field of view of the objective lens, a transmitted illumination optical system that illuminates the first area and a second area; an adjusting unit that adjusts positions on the sample of transmitted illumination light from the transmitted illumination optical system and reflected illumination light from the reflected illumination optical system; a first detector that detects a transmitted light transmitted by the sample and a reflected light reflected by the sample in the first area; and a second detector that detects through the objective lens a transmitted light transmitted by the sample in the second area.

REFERENCES:
patent: 5426503 (1995-06-01), Kusunose
patent: 6175645 (2001-01-01), Elyasaf et al.
patent: 7046355 (2006-05-01), Yu
patent: 7075638 (2006-07-01), Kvamme et al.
patent: 2003/0189703 (2003-10-01), Yonezawa et al.
patent: 2005/0134840 (2005-06-01), Yu
patent: 2005/0174570 (2005-08-01), Kvamme et al.
patent: 2006/0209298 (2006-09-01), Kvamme et al.
patent: 9-311108 (1997-12-01), None
patent: 2004-301751 (2004-10-01), None
patent: 2004-354088 (2004-12-01), None
patent: 2006-014133 (2006-01-01), None
patent: 2006-72147 (2006-03-01), None
patent: 2006072147 (2006-03-01), None
patent: 2006-112912 (2006-04-01), None
patent: 2007-298526 (2007-11-01), None

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