Inspection apparatus and method

Details Inspection apparatus and method Inspection apparatus and method

2008-06-25

2010-02-16

Tang, Minh N (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S750010, C324S754120

Reexamination Certificate

active

07663390

ABSTRACT:
There are provided an inspection apparatus and method that can locally perform sample temperature regulation, so that the sample drift can be suppressed. There are included a sample stage109that holds a semiconductor sample118, multiple probes106used to measure electrical characteristics of a semiconductor device on the semiconductor sample118, a power source that applies voltage and/or current to the probe106, a detector that measures electrical characteristics of the semiconductor device on the sample with which the probe is brought into contact, and an electromagnetic wave irradiating mechanism that irradiates electromagnetic wave on a measurement section of the semiconductor sample118.

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Mizuno et al “Development of High Temperature Sample Stage for Nano-Prober” LSI Testing Symposium-2006 pp. 301-304 The Institute of LSI Testing.

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