Inspection apparatus and method

Details Inspection apparatus and method Inspection apparatus and method

2011-04-12

2011-04-12

Toatley, Gregory J (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237300

Reexamination Certificate

active

07924418

ABSTRACT:
An inspection apparatus includes a captured image acquiring unit configured to acquire a captured image that is acquired by shooting an inspection target, an acquiring unit configured to acquire from the captured image a first image region and a second image region whose intensity distributions of reflected light with respect to an incident angle of illumination light emitted to the inspection target are different, and an image processing unit configured to perform image processing for performing different surface inspections on the first image region and the second image region respectively.

REFERENCES:
patent: 06-222013 (1994-08-01), None

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