Measuring and testing – Vibration – By mechanical waves
Reexamination Certificate
2011-06-21
2011-06-21
Williams, Hezron (Department: 2856)
Measuring and testing
Vibration
By mechanical waves
Reexamination Certificate
active
07963168
ABSTRACT:
The present invention is to provide inspection apparatus and method of being able to acquire electromagnetic wave response information of an inspection object at high speed as average information using an electromagnetic wave. An inspection apparatus using an electromagnetic wave2includes an electromagnetic wave generation and irradiation unit9which generates an electromagnetic wave and irradiates the electromagnetic wave on an inspection object11, and an electromagnetic wave detection unit10having a plurality of detection units. The plurality of detection units is arranged so as to detect the electromagnetic wave which is irradiated by the electromagnetic wave generation and irradiation unit and is transmitted or reflected with interacting with different sites of the inspection object11, and is constructed so as to detect the electromagnetic wave from the different sites in different detection time or detection frequencies respectively. The inspection apparatus acquires electromagnetic wave response information on the inspection object11based on detection signals from the plurality of detection units.
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Canon Kabushiki Kaisha
Fitzpatrick ,Cella, Harper & Scinto
Miller Rose M
Williams Hezron
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