Inspection apparatus and inspection method by using...

Radiant energy – Invisible radiant energy responsive electric signalling – Infrared responsive

Reexamination Certificate

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C250S341100, C250S341800

Reexamination Certificate

active

07919752

ABSTRACT:
An inspection apparatus includes a terahertz wave detection portion, a waveform shaping portion configured to shape a first answer signal with respect to a terahertz wave by using a signal acquired in the above-described terahertz wave detection portion, a measurement condition acquisition portion configured to acquire a first measurement condition, an answer signal storage portion configured to store second answer signals corresponding to measurement conditions, a selection portion configured to select the above-described second answer signal from the above-described answer signal storage portion, and a signal processing portion configured to conduct deconvolution with respect to the above-described first answer signal on the basis of the above-described second answer signal.

REFERENCES:
patent: 6078047 (2000-06-01), Mittleman et al.
patent: 6448553 (2002-09-01), Itsuji et al.
patent: 6835925 (2004-12-01), Itsuji et al.
patent: 7248995 (2007-07-01), Itsuji et al.
patent: 7358918 (2008-04-01), Itsuji
patent: 2005/0082479 (2005-04-01), Wallace et al.
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patent: 2005/0231416 (2005-10-01), Rowe et al.
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patent: 2007/0030115 (2007-02-01), Itsuji et al.
patent: 2007/0235718 (2007-10-01), Kasai et al.
patent: 2008/0161674 (2008-07-01), Monro
patent: 2008/0165062 (2008-07-01), Itsuji
patent: 2008/0186239 (2008-08-01), Itsuji
patent: 2008/0315098 (2008-12-01), Itsuji
patent: 2009/0009190 (2009-01-01), Itsuji
patent: 10 2005 023160 (2006-11-01), None
patent: 2410081 (2005-07-01), None
patent: 2438215 (2007-11-01), None
patent: 11-108845 (1999-04-01), None
Extended European Search Report dated May 11, 2009, from corresponding European Application No. 09150532.1.
Ferguson B. et al., “De-Noising Techniques for Terahertz Responses of Biological Samples” Microelectronics Journal, vol. 32, 2001, pp. 943-953.
U.S. Appl. No. 12/326,037, filed Dec. 1, 2008, Inventor: Takeaki Itsuji.

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