Inspection apparatus

Details Inspection apparatus Inspection apparatus

1994-03-10

1996-03-05

Rosenberger, Richard A.

Optics: measuring and testing

By polarized light examination

With light attenuation

356237, G01N 2100

Patent

active

054972345

ABSTRACT:
An inspection apparatus has a light source for irradiating lights to a sample. An optical element comprising of an achromatic lens converges the lights transmitted through or reflected by the sample to thereby form an image behind the back focal plane. An aperture stop is arranged at or near the back focal plane tot eliminating the lights scattered or refracted by the sample. The image is observed with a camera tube arranged behind the back focal plane.

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