Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate
2005-09-13
2005-09-13
Ahmed, Samir (Department: 2623)
Image analysis
Applications
Manufacturing or product inspection
C356S237300
Reexamination Certificate
active
06944325
ABSTRACT:
An apparatus for inspecting foreign matter in repeated micro-miniature patterns formed upon a surface of an object to be inspected, comprising: an inspection light illuminating device for irradiating an inspection light directed upon the surface of the object to be inspected, on which the repeated micro-miniature patterns are formed; a scattered light detector for detecting scattered light of the inspection light being scattered upon the surface said object to be inspected; means for obtaining a first information related to a foreign matter attaching upon the surface of said object to be inspected, which is obtained on a basis of the detection of said scattered light by said scattered light detector; an illumination means for applying a bright field illumination upon the surface of the object to be inspected, on which the repeated micro-miniature patterns are formed; means for picking up the image of the foreign matter, under a bright field illumination by said illumination means; means for obtaining a second information related to said foreign matter, depending upon an image of said foreign matter, which is obtained on a basis of said picking up of the image by said image picking up means under the bright field illumination; and means for displaying said first information and said second information, both being related to said foreign matter, on a display screen thereof.
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Ikoto Masami
Inoue Yuko
Shinke Wakana
Sugimoto Aritoshi
Taguchi Jun'ichi
Ahmed Samir
Antonelli Terry Stout & Kraus LLP
Hitachi High-Tech Electronics Engineering Co., Ltd.
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