Inspecting method and apparatus for repeated micro-miniature...

Image analysis – Applications – Manufacturing or product inspection

Reexamination Certificate

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C356S237300

Reexamination Certificate

active

06944325

ABSTRACT:
An apparatus for inspecting foreign matter in repeated micro-miniature patterns formed upon a surface of an object to be inspected, comprising: an inspection light illuminating device for irradiating an inspection light directed upon the surface of the object to be inspected, on which the repeated micro-miniature patterns are formed; a scattered light detector for detecting scattered light of the inspection light being scattered upon the surface said object to be inspected; means for obtaining a first information related to a foreign matter attaching upon the surface of said object to be inspected, which is obtained on a basis of the detection of said scattered light by said scattered light detector; an illumination means for applying a bright field illumination upon the surface of the object to be inspected, on which the repeated micro-miniature patterns are formed; means for picking up the image of the foreign matter, under a bright field illumination by said illumination means; means for obtaining a second information related to said foreign matter, depending upon an image of said foreign matter, which is obtained on a basis of said picking up of the image by said image picking up means under the bright field illumination; and means for displaying said first information and said second information, both being related to said foreign matter, on a display screen thereof.

REFERENCES:
patent: 4449818 (1984-05-01), Yamaguchi et al.
patent: 5544256 (1996-08-01), Brecher et al.
patent: 5822055 (1998-10-01), Tsai et al.
patent: 5917588 (1999-06-01), Addiego
patent: 6288780 (2001-09-01), Fairley et al.

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