Boots – shoes – and leggings
Patent
1984-10-10
1987-10-20
Krass, Errol A.
Boots, shoes, and leggings
382 8, 382 30, 382 34, 358107, 356394, 364559, G06F 1560, G06K 968, G01B 1100, H04N 718
Patent
active
047018593
ABSTRACT:
A method and the apparatus for inspecting the unit pattern arrangements on a photomask to determine relative shear between the unit patterns where each unit pattern has the same shape and size and is printed repeatedly at equal intervals on the photomask. Shear-detecting-patterns are provided on each unit pattern. Adjacent shear-detecting-patterns on adjacent unit patterns are designated as combined patterns. The combined patterns arranged in the same directions make a group. To detect an irregular shear, a standard pattern is designated from the combined patterns in a group and comparison is made between each combined pattern in the group and the standard pattern. An optical image of each combined pattern in a group is and converted into electric signals. The electrical signals for the standard pattern and for the other combined patters are stored a memory. The two sets of signals are read out and compared to provide a shear difference between the patterns. The difference is determined by counting the number of occupied or unoccupied memory locations in both the standard and the other images. The difference in count produces the shear difference. The shear difference is compared with a or tolerance level and it is determined whether the combined pattern arrangement in the group is correct based on the comparison.By repeating the comparison in other groups, it can be determined whether the unit pattern arrangement is correct.
REFERENCES:
patent: 4115762 (1978-09-01), Akiymama et al.
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patent: 4334241 (1982-06-01), Kashioka et al.
patent: 4556317 (1985-12-01), Sandland et al.
patent: 4569123 (1986-02-01), Ishii et al.
patent: 4581762 (1986-04-01), Lapidus et al.
Kobayashi Ken-ichi
Matsuyama Takayoshi
Dixon Joseph L.
Fujitsu Limited
Krass Errol A.
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