Inspecting device for semiconductor wafer

Details Inspecting device for semiconductor wafer Inspecting device for semiconductor wafer

2005-11-08

2005-11-08

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S394000, C250S559290

Reexamination Certificate

active

06963394

ABSTRACT:
A inspecting device for a semiconductor wafer comprises: a holding unit which holds a wafer; an aligner unit which detects a cutout position and a center position of the wafer held by the holding unit and obtains position determining data of the wafer; an observing unit for magnifying and observing fine patterns on the wafer, the observing unit being disposed at a position where the wafer held by the holding unit can be observed; a moving unit which relatively moves the holding unit with respect to the observing unit; and a control unit which controls the moving unit to move the holding unit based on the obtained position data so that the fine patterns at a desired position can be observed.

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patent: 11-194098 (1999-07-01), None

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