Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2007-11-27
2007-11-27
Stafira, Michael P. (Department: 2886)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
C356S237400
Reexamination Certificate
active
11392656
ABSTRACT:
An inspecting apparatus includes an illuminating optical system which irradiates irradiation light onto an object to be inspected, an object placing stage which moves the object along a first direction, an accumulative sensor which converts a transmitted image of the object into an electric signal, a sensor drive unit which moves the accumulative sensor in the irradiation direction and a second direction crossing the first direction, a moving amount detecting unit which detects a moving amount of the object placing stage in the second direction, a control unit which controls a drive amount of the sensor drive unit in the second direction on the basis of the moving amount in the second direction detected by the moving amount detecting unit, and a data comparing unit which compares the transmitted image data of the object with a reference data to detect a defect of the object.
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patent: 7032208 (2006-04-01), Yamashita
patent: 2002/0001759 (2002-01-01), Ohashi et al.
patent: 2004/0263829 (2004-12-01), Ikeda
patent: 11-72905 (1999-03-01), None
patent: 2003-121984 (2003-04-01), None
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