Inspecting apparatus for glass substrate

Details Inspecting apparatus for glass substrate Inspecting apparatus for glass substrate

2007-12-28

2009-12-08

Punnoose, Roy (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

Transparent or translucent material

C356S237200

Reexamination Certificate

active

07630071

ABSTRACT:
An inspecting apparatus for a glass substrate detects blurs of a green color filter layer, a blue color filter layer, a column spacer layer, a pixel layer of a thin film transistor, or the like, which are generally hardly inspected. The inspecting apparatus for a glass substrate includes: a first illumination unit supplying reflective light to a surface of the substrate to inspect whether the surface of the substrate is defective or not; a second illumination unit supplying transmissive light from a rear side of the substrate to inspect whether the interior of the substrate is defective or not; a latticed rear plate provided on a rear surface of the substrate; and a driving interferometer system generating a phase difference of light by driving such that a driving guide is moved along the rear plate or the rear plate itself is moved.

REFERENCES:
patent: 3792930 (1974-02-01), Obenreder
patent: 5691811 (1997-11-01), Kihira
patent: 7215418 (2007-05-01), Gahagan et al.
patent: 2004/0174519 (2004-09-01), Gahagan et al.
patent: 2008/0055606 (2008-03-01), Inoue et al.

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