Inspecting apparatus for determining presence and location of fo

Details Inspecting apparatus for determining presence and location of fo Inspecting apparatus for determining presence and location of fo

1989-01-19

1990-10-30

McGraw, Vincent P.

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

356239, 356338, 250572, G01N 2188

Patent

active

049664573

ABSTRACT:
A defect inspecting apparatus for determining the presence of a defect element adhering to either of the front and back surfaces of a thin film-like object to be inspected (the object having a light-transmitting property) applies two light beams of different wavelengths to a surface of the object and varies the incident angle of the light beams. A first photoelectric detector receives light of the two light beams reflected by or transmitted by the object, and a second photoelectric detector receives light of the two light beams scattered by the defect element. A discriminator determines the surface of the object to which the defect element adheres based on detection outputs of the photoelectric detectors.

REFERENCES:
patent: 4265545 (1981-05-01), Slaker
patent: 4468120 (1984-08-01), Tanimoto et al.
patent: 4610541 (1986-09-01), Tanimoto et al.
patent: 4669875 (1987-06-01), Shiba et al.

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