Inspecting a workpiece using polarization of scattered light

Details Inspecting a workpiece using polarization of scattered light Inspecting a workpiece using polarization of scattered light

2009-10-22

2011-11-15

Toatley, Gregory J (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S600000

Reexamination Certificate

active

08059268

ABSTRACT:
A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable polarization a polarizing relay assembly arranged to selectively permit the scattered light having a selected polarization orientation to pass along a detector optical axis to a light detection unit in the detection subsystem. They system also features a collector output width varying subsystem for varying the width of an output slit in response to changes in the location of the location scanned on the workpiece.

REFERENCES:
patent: 7505133 (2009-03-01), Zawaideh et al.

Affiliated with

Also associated with

Rating

Inspecting a workpiece using polarization of scattered light does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Inspecting a workpiece using polarization of scattered light, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Inspecting a workpiece using polarization of scattered light will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4290344