Inorganic-polymer-derived dielectric films

Details Inorganic-polymer-derived dielectric films Inorganic-polymer-derived dielectric films

1985-02-25

1987-03-24

Lawrence, Evan K.

Coating processes

Foraminous product produced

Microporous coating

427 93, 427162, 427165, 427168, 427169, 427243, 427247, B05D 506, B05D 512, B05D 724

Patent

active

046524673

ABSTRACT:
A method of coating a substrate with a thin film of a polymer of predetermined porosity comprises depositing the thin film on the substrate from a non-gelled solution comprising at least one hydrolyzable metal alkoxide of a polymeric network forming cation, water, an alcohol compatible with the hydrolysis and the polymerization of the metal alkoxide, and an acid or a base, prior to depositing the film, controlling the structure of the polymer for a given composition of the solution exclusive of the acid or base component and the water component, (a) by adjusting each of the water content, the pH, and the temperature to obtain the desired concentration of alkoxide, and then adjusting the time of standing of the solution prior to lowering the temperature of the solution, and (b) lowering the temperature of the solution after the time of standing to about 15 degrees C. or lower to trap the solution in a state in which, after the depositing step, a coating of the desired porosity will be obtained, and curing the deposited film at a temperature effective for curing whereby there is obtained a thin film of a polymer of a predetermined porosity and corresponding pore size on the substrate.

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