Inorganic film base plate, process for producing the same,...

Details Inorganic film base plate, process for producing the same,... Inorganic film base plate, process for producing the same,...

2011-04-12

2011-04-12

Budd, Mark (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S324000

Reexamination Certificate

active

07923903

ABSTRACT:
An inorganic film base plate is produced with a process comprising the steps of: preparing a surface recess-protrusion base plate, which is provided with a recess-protrusion pattern on a surface, and forming an inorganic film along a surface shape of the surface recess-protrusion base plate, the inorganic film containing a plurality of pillar-shaped structure bodies, each of which extends in a direction nonparallel with the base plate surface of the surface recess-protrusion base plate. Force of physical action may then be exerted upon the thus formed inorganic film in order to separate an on-protrusion film region of the inorganic film and an adjacent on-recess film region of the inorganic film from each other.

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