Machines not elsewhere specified – Heat treatment – welding or brazing
Design Patent
2003-05-20
2004-06-22
Davis, Antoine D. (Department: 2913)
Machines not elsewhere specified
Heat treatment, welding or brazing
Design Patent
active
D0491963
CLAIM:
I claim the ornamental design for inner wall shield for a process chamber for manufacturing semiconductors, as shown and described.
REFERENCES:
patent: 6432203 (2002-08-01), Black et al.
patent: 6630201 (2003-10-01), Chiang et al.
Davis Antoine D.
Ladas & Parry
Tokyo Electron Limited
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