Inline connection setting method and device and substrate...

Details Inline connection setting method and device and substrate... Inline connection setting method and device and substrate...

2007-01-23

2007-01-23

Von Buhr, Maria N. (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

Reexamination Certificate

active

10546385

ABSTRACT:
It at least includes a step at which a coating and developing apparatus requests an exposure apparatus, connected inline thereto, to transfer profile information which is information relating to the exposure apparatus, a step at which the coating and developing apparatus receives the profile information from the exposure apparatus, and a step at which the coating and developing apparatus selects a software file to be used in the coating and developing apparatus, in association with the profile information.

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