Inlet valve for a high-vacuum analyzer with bypass evacuation

Measuring and testing – Sampler – sample handling – etc. – Analyzer supplier

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250288, F16K 5102, G01N 3700

Patent

active

054047650

ABSTRACT:
An ultra-high vacuum valve for the admission of substance mixtures into an analytical measuring instrument limits the flow path of the substances to as small a flow chamber as possible with controllable chamber wall adsorption properties. The elastic wall sections necessary for movement of the valve piston are located in a mechanical chamber separated from the flow chamber by a wall. The mechanical chamber is evacuated by means of a separate vacuum duct and a seal is used to seal the valve piston where it passes through the wall.

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Ultrahigh Vacuum Practice, G. F. Weston, (1985), PP. 23-25 Butterworth & Co., Ltd.

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