Inkjet recording head and method for manufacturing the same

Details Inkjet recording head and method for manufacturing the same Inkjet recording head and method for manufacturing the same

2005-08-23

2005-08-23

Tugbang, A. Dexter (Department: 3729)

Metal working

Piezoelectric device making

C029S890100, C029S830000, C029S831000, C347S070000, C156S153000, C216S027000

Reexamination Certificate

active

06931702

ABSTRACT:
An inkjet recording head includes a two-dimensional array of a pressure chambers and corresponding array of piezoelectric elements each for applying a pressure wave to ink in a corresponding pressure chamber. In fabrication, a piezoelectric plate temporarily bonded onto a substrate is subjected to sandblasting to form the plurality of piezoelectric elements After the piezoelectric elements are bonded as a unit onto a diaphragm which constitutes part of the walls of the pressure chambers, the substrate is removed. Dummy patterns equalize the degree of side etching among the piezoelectric elements.

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