Inkjet printhead having a self aligned nozzle

Incremental printing of symbolic information – Ink jet – Ejector mechanism

Reexamination Certificate

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Details

C347S047000

Reexamination Certificate

active

06273544

ABSTRACT:

FIELD OF THE INVENTION
The present invention relates to the construction of inkjet printing arrangements having a series of nozzles for the ejection of ink utilizing the multiple layer deposition techniques.
BACKGROUND OF THE INVENTION
The construction of micro-mechanical fluid ejection devices such as ink ejection devices it is important to have as symmetrical a nozzle aperture as possible otherwise fluctuations in ink ejection direction are likely to exist.
Unfortunately, if the inkjet print head is formed using semiconductor fabrication techniques, it is unlikely that a fully symmetrical nozzle would be formed.
SUMMARY OF THE INVENTION
It is an object of the present invention to provide for an improved form of nozzle rim which utilizes a self aligning mechanism to ensure uniformity of the dimensions of the nozzle rim of a fluid ejection mechanism.
In accordance with a first aspect of the present invention, there is provided an inkjet printhead having a series of nozzles for the ejection of ink wherein each said nozzle has a rim formed by the conformal deposition of a rim material layer over a sacrificial layer and a subsequent planar etching of at least said rim material layer so as to form said nozzle rim.
The planar etching can comprise chemical—mechanical planarization of the rim material layer and any associated sacrificial layers.


REFERENCES:
patent: 5126768 (1992-06-01), Nozawa et al.
patent: 5896155 (1999-04-01), Lebens et al.
patent: 2086807 (1982-05-01), None
patent: 2333065 (1999-07-01), None

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