Inkjet head and a method of manufacturing the same

Details Inkjet head and a method of manufacturing the same Inkjet head and a method of manufacturing the same

2007-06-05

2007-06-05

Do, An H. (Department: 2853)

Incremental printing of symbolic information

Ink jet

Ejector mechanism

Reexamination Certificate

active

10890261

ABSTRACT:
An inkjet head is provided and includes: a chamber substrate for forming an ink flow passage; a diaphragm substrate including a diaphragm for pressurizing a pressure chamber disposed in the chamber substrate; and a nozzle substrate for jetting ink pressurized by the diaphragm, wherein the diaphragm substrate is made of silicon, the diaphragm is made of a material selected from the group of silicon oxide film and metal film, and the diaphragm is formed in the diaphragm substrate. A method of manufacturing the inkjet head is also provided.

REFERENCES:
patent: 5812163 (1998-09-01), Wong
patent: 6213590 (2001-04-01), Fujii et al.
patent: 6398349 (2002-06-01), Murai
patent: 5-50601 (1993-03-01), None
patent: 5-309835 (1993-11-01), None
patent: 6-55733 (1994-03-01), None
patent: 3108954 (2000-09-01), None
patent: 3168713 (2001-03-01), None

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