Ink jet recording head and a method for manufacturing such ink j

Incremental printing of symbolic information – Ink jet – Ejector mechanism

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347 67, B41J 205

Patent

active

061132225

ABSTRACT:
An ink jet recording head is provided at least with ink discharge pressure generating elements, nozzles for discharging ink liquid droplets, and a through opening formed by means of Si anisotropic etching for the ink supply on the Si substrate having <100 > plane orientation. Then, the oxygen concentration of the Si substrate having the <100> plane orientation is arranged to be 1.3E18 (atoms/cm.sup.3) or less. With the substrate thus arranged, it becomes possible to enhance the production yield when forming the ink supply ports by means of the Si anisotropic etching, and at the same time, it is possible to reduce the variation of the widths of the ink supply ports that may be caused by the Si anisotropic etching. Thus, the ink discharge frequency is enhanced.

REFERENCES:
patent: 4789425 (1988-12-01), Drake et al.
patent: 5786832 (1998-07-01), Yamanaka et al.

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