Incremental printing of symbolic information – Ink jet – Ejector mechanism
Reexamination Certificate
2002-01-07
2002-11-12
Barlow, John (Department: 2853)
Incremental printing of symbolic information
Ink jet
Ejector mechanism
C347S047000, C347S065000
Reexamination Certificate
active
06478408
ABSTRACT:
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a bubblejet type ink-jet printhead. More particularly, the present invention relates to an ink-jet printhead having a hemispherical ink chamber and a method for manufacturing the same.
2. Description of the Related Art
Ink-jet printheads are devices for printing a predetermined image by ejecting small droplets of printing ink at desired positions on a recording sheet. Ink ejection mechanisms of an inkjet printer are generally categorized into two different types: an electro-thermal transducer type (bubble-jet type), in which a heat source is employed to form a bubble in ink causing an ink droplet to be ejected, and an electro-mechanical transducer type, in which a piezoelectric crystal bends to change the volume of ink causing ink droplets to be expelled.
FIGS. 1A and 1B
are diagrams illustrating a conventional bubble-jet type ink-jet printhead. Specifically,
FIG. 1A
is a perspective view illustrating the structure of an ink ejector as disclosed in U.S. Pat. No. 4,882,595.
FIG. 1B
illustrates a cross-sectional view of the ejection of an ink droplet in the conventional ink ejector.
The conventional bubble-jet type ink-jet printhead shown in
FIGS. 1A and 1B
includes a substrate
10
, a barrier wall
12
formed on the substrate
10
to form an ink chamber
13
for containing ink
19
, a heater
14
installed in the ink chamber
13
, and a nozzle plate
11
having a nozzle
16
for ejecting an ink droplet
19
′. The ink
19
is supplied to the ink chamber
13
through an ink channel
15
, and the ink
19
fills the nozzle
16
connected to the ink chamber
13
by capillary action. In a printhead of the current configuration, if current is applied to the heater
14
to generate heat, a bubble
18
is generated in the ink
19
filling the ink chamber
13
and continues to expand. Due to the expansion of the bubble
18
, pressure is applied to the ink
19
within the ink chamber
13
, and thus the ink droplet
19
′ is ejected through the nozzle
16
. Next, ink
19
is supplied through the ink channel
15
to refill the ink chamber
13
.
There are multiple factors and parameters to consider in making an ink-jet printhead having a bubble-jet type ink ejector. First, it should be simple to manufacture, have a low manufacturing cost, and be capable of being mass-produced. Second, in order to produce high quality color images, the formation of minute, undesirable satellite ink droplets that usually trail an ejected main ink droplet must be avoided. Third, when ink is ejected from one nozzle or when ink refills an ink chamber after ink ejection, cross-talk with adjacent nozzles, from which no ink is ejected, must be avoided. To this end, a back flow of ink in a direction opposite to the direction ink is ejected from a nozzle must be prevented during ink ejection. Fourth, for high-speed printing, a cycle beginning with ink ejection and ending with ink refill in the ink channel must be carried out in as short a period of time as possible. In other words, an ink-jet printhead must have a high driving frequency.
The above requirements, however, tend to conflict with one another. Furthermore, the performance of an ink-jet printhead is closely associated with and affected by the structure and design of an ink chamber, an ink channel, and a heater, as well as by the type of formation and expansion of bubbles, and the relative size of each component.
In an effort to overcome problems related to the above requirements, various inkjet printheads having different structures have already been suggested in U.S. Pat. Nos. 4,882,595; 4,339,762; 5,760,804; 4,847,630; 5,850,241; European Patent No. 317,171; and Fan-gang Tseng, Chang-jin Kim, and Chih-ming Ho, “A Novel Microinjector with Virtual Chamber,” IEEE MEMS, pp. 57-62, 1998. However, ink-jet printheads proposed in the above-mentioned patents and publication may satisfy some of the aforementioned requirements but do not completely provide an improved ink-jet printing approach.
SUMMARY OF THE INVENTION
In an effort to solve the above-described problems, it is a feature of an embodiment of the present invention to provide an ink-jet printhead having a hemispherical chamber, which is capable of effectively cooling heat generated by a heater, and a method for manufacturing the same.
Accordingly, an embodiment of the present invention provides a method for manufacturing an ink-jet printhead having a hemispherical chamber. The method includes forming a ring-shaped groove for forming a nozzle guide at the surface of a substrate, forming a nozzle plate and a nozzle guide having a multi-layered structure and including a thermally conductive layer formed at the surface of the substrate, forming a heater on the nozzle plate, forming a manifold for supplying ink by etching the substrate, forming an electrode on the nozzle plate to be electrically connected to the heater, forming a nozzle having almost the same diameter as the nozzle guide by etching the nozzle plate inside the heater, forming an ink chamber in a substantially hemispherical shape by etching the substrate exposed through the nozzle, and forming an ink channel for supplying ink from the manifold to the ink chamber by etching the substrate.
Here, forming the nozzle plate and the nozzle guide preferably includes forming a first insulating layer at the surface of the substrate and the inner surfaces of the ring-shaped groove, forming the thermally conductive layer by depositing polysilicon on the first insulating layer and simultaneously forming the nozzle guide by filling the polysilicon in the ring-shaped groove, and forming a second insulating layer on the thermally conductive layer.
According to the present invention, since an ink chamber, an ink channel, and a manifold for supplying ink are integrally formed in a substrate into one body and a nozzle plate, a heater, and a nozzle guide are also integrally formed on the substrate into one body, the manufacture of an ink-jet printhead having a structure according to the present invention is simplified, and thus mass production of the printhead is facilitated.
REFERENCES:
patent: 0 317 171 (1989-05-01), None
“A Novel Microinjector with Virtual Chamber Neck,” Fan-Gang Tseng et al., IEEE MEMS, pp. 57-62, 1998.
Kim Hyeon-cheol
Lee Sang-wook
Oh Yong-soo
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