Injection pinch discharge extreme ultraviolet source

Details Injection pinch discharge extreme ultraviolet source Injection pinch discharge extreme ultraviolet source

2006-07-11

2006-07-11

Nguyen, Kiet T. (Department: 2881)

Radiant energy

Radiant energy generation and sources

With radiation modifying member

C378S119000

Reexamination Certificate

active

07075096

ABSTRACT:
A source of extreme ultraviolet or soft X-ray photon source includes discharge chamber containing a buffer gas, first and second electrodes in the discharge chamber configured to deliver a heating current to a plasma discharge region, and an injector to project a particle of a working substance into the plasma discharge region. The particle is evaporated and ionized by the heating current to form a hot plasma that radiates extreme ultraviolet or soft X-ray photons.

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patent: 6946669 (2005-09-01), Kleinschmidt
Krauz et al., Article: “Plasma Focus Research At The Kurchatov Institute”, RRC Kurchatov Institute, Institute of Nuclear Fusion, Moscow, FORTOV, Institute for High Energy Densities of Associated Institute for High Temperatures, Russian Academy of Sciences, Moscow.

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