Injection locking type or MOPA type of gas laser device

Details Injection locking type or MOPA type of gas laser device Injection locking type or MOPA type of gas laser device

2005-12-06

2005-12-06

Harvey, Minsun Oh (Department: 2828)

Coherent light generators

Particular active media

Gas

C372S058000

Reexamination Certificate

active

06973111

ABSTRACT:
An injection locking type or MOPA type of gas laser device which requires only a small installation area and allows easy maintenance. For this purpose, the laser device includes a seed laser unit (11) for exciting a laser gas inside a laser chamber (12) and oscillating seed laser light (21) and an amplifier (111) for exciting a laser gas inside an amplifying chamber (112) and amplifying pulse energy of the seed laser light (21), and allows the laser chamber (12) and the amplifying chamber (112) to be evacuated to the same side with respect to an optical axis of the seed laser light (21).

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A. Ershov et al; Feasibility of Highly Line-Narrowed F2Laser for 157 nm Microlithography; 2000 SPIE—The International Society for Optical Engineering; pp. 1-8.

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