Ingot slicing machine and method

Details Ingot slicing machine and method Ingot slicing machine and method

1982-06-11

1984-10-09

Whitehead, Harold D.

Stone working

Sawing

Rotary

82 90, 83664, 83676, 125 15, 51 73R, B28D 104

Patent

active

044755279

ABSTRACT:
An improvement in a method for simultaneously slicing one or a multiplicity of boules of silicon into silicon wafers, the improvement of which comprises forming a plurality of vertical stacks of horizontal saw blades of circular configuration arranged in juxtaposed coaxial alignment, each blade being characterized by having a cutting diameter slightly greater than the cutting diameter of the blade arranged immediately thereabove; imparting simultaneous rotation to the blades, supporting in depending relation a plurality of enlongated boules of silicon, simultaneously translating the boules through the blades, and simultaneously imparting rotation to the boules as the boules are passed through said blades for slicing wafers therefrom; and an improved apparatus for performing said method.

REFERENCES:
patent: 2356038 (1944-08-01), Edwards
patent: 3039235 (1962-06-01), Heinrich
patent: 3550323 (1970-12-01), Balsiger
patent: 4150912 (1979-04-01), Gutsche

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