Coating processes – Electrical product produced
Patent
1993-08-11
1995-02-14
Beck, Shrive
Coating processes
Electrical product produced
427124, 4272552, 4272557, C23C 1600
Patent
active
053893964
ABSTRACT:
Diode lasers of the formula GaInP/InGaAsP on GaAs substrates which operate at powers up to 5.3 W with emitting apertures of 100 microns are disclosed. By varying compositions of the active layer and by employing strained layer quantum wells, InGaAsP diode lasers are fabricated over the wavelength range of 700 to 1100 nm.
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K. Sugiyama et al "Vapor Phase Epitaxial Growth and Characterization of Ga.sub.1-y Iny As.sub.1-x Px Quaternary Alloys" Japanese Journal of Applied Physics vol. 16, No. 12, Dec. 1977, pp. 2197-2203.
"Accurate Determination of Misfit Strain, Layer Thickness, and Critical Layer Thickness in Ultrathin Buried Strained InGaAs/GaAs Layer by X-Ray Diffraction," Chen, Y. C. et al., Mar/Apr 1992, J. Vac. Sci. Technol. B 10 (2), (American Vacuum Society), pp. 769-771.
"Ga.sub.0.51 In.sub.0.49 P/Ga.sub.x In.sub.1-x As Lattice-Matched (x=1) and Strained (x=0.85) Two Dimensional Electron Gas Field-Effect Transistors," Razeghi, M., et al., Semicond. Sci. Technol. 6, 1991, (IOP Publishing Ltd.), pp. 103-7.
"High-Power 0.8.mu.m InGaAsP-GaAs SCHSQW Lasers," Garbuzov, D. Z., et al., IEEE Journal of Quantum Electronics, vol. 27, No. 6, Jun. 1991, pp. 1531-1535.
"Recent Advances on GaAs-GAInP Multiquantum Wells Grown in MOCVD on GaAs, InP and Silicon Substrates," Omnes, F. et al., Thomson CSF LCR, (91404 Orsal Cedex, France), pp. 15-36 No month, year.
"Low-Pressure Metallo-Organic Chemnical Vapor Deposition of Ga.sub.x In.sub.1-x As.sub.y P.sub.1-y Alloys," Razeghi, M., Semiconductors and Semimetals, vol. 22, Part A, pp. 299-378 No month, year.
"Growth Technology," Razeghi, M., The MOCVD Challenges, vol. 1, A Survey of GaInAsP-InP for Photonic and Electronic Applications, (Bristol: Adam Hilger), pp. 3-17 No month, year.
"GaInAsP-InP Sysatem: MOCVD Growth, Characterization and Application," Razeghi, M., The MOCVD Challenges, vol. 1, A Survey of GaInAsP-InP for Photonic and Electronic Applications, (Bristol: Adam Hilger), pp. 165-215 no month, year.
Beck Shrive
Dang Vi Duong
Northwestern University
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