Infrared window protected by multilayer antireflective coating

Details Infrared window protected by multilayer antireflective coating Infrared window protected by multilayer antireflective coating

1992-08-10

1995-06-20

Turner, A. A.

Stock material or miscellaneous articles

Structurally defined web or sheet

Including components having same physical characteristic in...

428212, 428446, 428408, 428469, B21D 3900

Patent

active

054259835

ABSTRACT:
An infrared window (26) includes a substrate (40) made of a zinc salt composition and an antireflection coating system (42) deposited on the substrate (40). The coating system (42) comprises a first layer (44) of germanium overlying the substrate (40), a second layer (46) of diamond-like carbon overlying the first layer (44), a third layer (48) of germanium overlying the second layer (46), and a fourth layer (50) of diamond-like carbon overlying the third layer (48). Preferably, the germanium layers (44, 48) are in tension and the diamond-like carbon layers (46, 50) are in compression. The germanium layers (44, 48) are preferably deposited by magnetron sputtering and the diamond-like carbon layers (46, 50) are preferably deposited by plasma activated chemical vapor deposition. Silicon may be used in place of the germanium, and graded compositions can be used for the first layer (44) and the third layer (48).

REFERENCES:
patent: 4383728 (1983-05-01), Litington
patent: 4915977 (1990-04-01), Okamoto et al.
patent: 4939043 (1990-07-01), Biricik et al.

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