Infrared window

Details Infrared window Infrared window

1990-07-27

1992-09-08

Padgett, Marianne

Coating processes

Electrical product produced

Welding electrode

427252, 427124, 118725, 118 501, 118641, 359350, 359894, B05D 306, C23C 1600, G02B 2602, B05B 500

Patent

active

051457164

ABSTRACT:
The invention provides an apparatus for metal plating a substrate. The apparatus includes a chamber adapted to receive metal carbonyl gas. The chamber includes an infrared transparent window. The infrared transparent window has a cooling passage filled with liquid coolant. The liquid coolant has a temperature below which decomposition of the metal carbonyl gas occurs. The liquid coolant prevents decomposition of the metal carbonyl gas on the infrared transparent window. The liquid coolant also is substantially infrared transparent for allowing infrared radiation through the infrared transparent window and cooling passage into the chamber. An infrared radiation source sends infrared radiation into the chamber through the infrared transparent window and cooling passage to heat the substrate to a temperature at which decomposition of the metal carbonyl gas occurs.

REFERENCES:
patent: 2649754 (1953-08-01), Davis et al.
patent: 2867552 (1959-01-01), Homer
patent: 3213827 (1965-10-01), Jenkin
patent: 3900646 (1975-08-01), Clyde
patent: 4312794 (1982-01-01), Pearce et al.
patent: 4431257 (1984-02-01), Born
patent: 4550684 (1985-11-01), Mahawili
patent: 4570043 (1986-02-01), Lloyd et al.
patent: 4749950 (1988-07-01), Stevens
patent: 4766665 (1988-08-01), McKernan et al.

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