Infrared thermopile detector system for semiconductor...

Details Infrared thermopile detector system for semiconductor... Infrared thermopile detector system for semiconductor...

2006-03-14

2006-03-14

Lebentritt, Michael (Department: 2812)

Tool changing

With means to transfer work

C073S204150

Reexamination Certificate

active

07011614

ABSTRACT:
A thermopile-based detector for monitoring and/or controlling semiconductor processes, and a method of monitoring and/or controlling semiconductor processes using thermopile-based sensing of conditions in and/or affecting such processes.

REFERENCES:
patent: 4935345 (1990-06-01), Guilbeau
patent: 5047352 (1991-09-01), Stetter et al.
patent: 5282473 (1994-02-01), Braig et al.
patent: 5464983 (1995-11-01), Wang
patent: 5589689 (1996-12-01), Koskinen
patent: 5650624 (1997-07-01), Wong
patent: 5721430 (1998-02-01), Wong
patent: 5834777 (1998-11-01), Wong
patent: 6348650 (2002-02-01), Endo et al.
patent: 6370950 (2002-04-01), Lammerink
patent: 6469303 (2002-10-01), Sun et al.
IEEE 100, “The Authoritative Dictionary of IEEE Standards Terms”, Seventh Edition ISBN 0-7381-2601-2, page#1174.
Application Note of Thermopile IR Sensors, (Rev.02), Thermometrics Global Business, pp. 1-9, and attachment pages, Sep. 1999.
Paul A. Wilks, Wilks Enterprise, “The Birth of Infrared Filometry”, Spectroscopy SHOWCASE, Guest Editorial, p. 14, Mar. 2002.
Jurgen Schilz, Perkin Elmer Optoelectronics, Applications of Thermoelectric Infrared Sensors (Thermopiles): Gas Detection by Infrared Absorption; NDIR, pp. 1-11.
Peter Adrian, Sensor Business Digest, Vital Information Publication, Sensor Business Digest Sensor Industry Developments and Trends, Oct. 2001.

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