Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Temperature
Patent
1998-08-05
2000-12-19
Saadat, Mahshid
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Temperature
257414, 257415, H01L 31058, H01L 2714, H01L 2982, H01L 2984
Patent
active
061630616
ABSTRACT:
An infrared solid-state image sensor comprises a semiconductor substrate, a first diaphragm, supported on the semiconductor substrate via a first support portion, for supporting a hot junction of thermocouples for converting a temperature change, caused by irradiation of infrared rays to an infrared absorption layer, to an electric signal, and the infrared absorption layer, and a second diaphragm, supported on the semiconductor substrate via a second support portion, for supporting a wiring portion for outputting a signal from the hot junction of the thermocouples.
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Toshio Kanno, et al., "Uncooled Infrared Focal Plane Array Having 128.times.128 Thermopile Detector Elements", SPIE vol. 2269, Infrared Technology XX (1994), pp. 450-459.
Kabushiki Kaisha Toshiba
Saadat Mahshid
Wilson Allan R.
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