Infrared sensor and method for production thereof

Details Infrared sensor and method for production thereof Infrared sensor and method for production thereof

1994-12-28

1996-05-28

Thomas, Tom

Fishing, trapping, and vermin destroying

H01L 2160

Patent

active

055211232

ABSTRACT:
The disclosed infrared sensor comprises a substrate provided with a bridging part and a sensing part made of an infrared temperature-sensitive film formed on the bridging part. A first lid member covers the sensing part and bridging part and a second lid member covers the reverse surface of the substrate and tightly seals a cavity formed between the substrate and the bridging part. The invention preferably comprises an electrode pad electrically connected to the infrared temperature sensitive film and formed of a laminate film including an etchant-resistant electrically conductive film. The invention provides an infrared sensor with a small stable bridging structure which allows easy formation of a contact hole on an electrode pad without causing a breakage of the bridging part. A method for the production of an infrared sensor is also disclosed.

REFERENCES:
patent: 4023562 (1977-05-01), Hynecek et al.
patent: 4472239 (1984-09-01), Johnson et al.
patent: 4618397 (1986-10-01), Shimizu et al.
patent: 5051379 (1991-09-01), Bayer et al.
patent: 5106784 (1992-04-01), Bednarz
patent: 5188983 (1993-02-01), Guckel et al.
patent: 5242863 (1993-09-01), Xiang-Zheng et al.

Affiliated with

Also associated with

Rating

Infrared sensor and method for production thereof does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Infrared sensor and method for production thereof, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Infrared sensor and method for production thereof will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-786404