Infrared sensor and method for production thereof

Radiant energy – Invisible radiant energy responsive electric signalling – Infrared responsive

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25037001, G01J 520

Patent

active

053978978

ABSTRACT:
An infrared sensor including a substrate provided with a bridging part; a detecting part composed of an infrared temperature-sensitive film formed in the bridging part; an electrode pad formed of a laminate film and an etchant-resistant electrically conductive film electrically connected to the infrared temperature-sensitive film; a first lid covering the detecting part and the bridging part; and a second lid covering another surface of the substrate and tightly closing a cavity formed between the substrate and the bridging part.

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