Radiant energy – Invisible radiant energy responsive electric signalling – Infrared responsive
Patent
1993-04-19
1995-03-14
Hannaher, Constantine
Radiant energy
Invisible radiant energy responsive electric signalling
Infrared responsive
25037001, G01J 520
Patent
active
053978978
ABSTRACT:
An infrared sensor including a substrate provided with a bridging part; a detecting part composed of an infrared temperature-sensitive film formed in the bridging part; an electrode pad formed of a laminate film and an etchant-resistant electrically conductive film electrically connected to the infrared temperature-sensitive film; a first lid covering the detecting part and the bridging part; and a second lid covering another surface of the substrate and tightly closing a cavity formed between the substrate and the bridging part.
Kimura Mitsuteru
Komatsu Kiyoshi
Mori Takehisa
Sone Atsushi
Glick Edward J.
Hannaher Constantine
Terumo Kabushiki Kaisha
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