Infrared sensor and infrared detector

Details Infrared sensor and infrared detector Infrared sensor and infrared detector

1997-06-12

1999-10-05

Hannaher, Constantine

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

2503381, G01J 520, G01J 524

Patent

active

059628545

ABSTRACT:
A chip-shaped infrared sensor comprising a substrate formed with a cavity, an infrared radiation receiving portion supported in the form of a micro air bridge in the cavity by four hook-shaped beam portions extending from the substrate, two thermistor films for infrared radiation detection formed on the infrared radiation receiving portion, two thermistor films for temperature compensation arranged on the substrate, and a single thermistor film arranged on the substrate for detecting temperature of the substrate.

REFERENCES:
patent: 5302933 (1994-04-01), Kudo et al.
patent: 5397897 (1995-03-01), Komatsu et al.
patent: 5589688 (1996-12-01), Kimura et al.
patent: 5825029 (1998-10-01), Agnese et al.

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